Customization: | Available |
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After-sales Service: | Online |
Warranty: | Consumables |
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RU2 Reader Performance | |
Resolutin ratio | Digital 1um,0.5um,0.2um,0.1um,20nm,50nm. |
Simulation 20um | |
Minimum clock frequency of counter | 1m,2.5m,5m,10m |
Maximum speed | 12m/s relating to resolution and minimum clock frequency of counter |
Electronic subdivision error | 40nm |
Automatic gain control | Yes |
Automatic correction | Yes |
Specfications | Coefficient of thermal | 10.5um/m/°C | |
Grating ruler type | Incremental type | Weight | 12.6g/m |
Pitch | 20um | Material | High Strength stainless steel |
Precision | +- 5um/m | Environmental requirements | |
Linearity | +- 2.5um/m Two point correction is possible | Working temperature | 0~70°C |
Size | H 0.2mm*W 8mm | Storage temperature | -20~70°C |
Size of gum | H 0.1mm*W 6mm | Working humidity | RH< 95%(Non condensation) |
Supply length | 100mm-50m | Storage humidity | RH< 95%(Non condensation) |